IWAPS is devoted to publishing research on the cutting-edge microelectronic manufacturing technology. The scope of the conference covers studies of advanced semiconductor manufacturing sciences and technologies from early stage theories and experiments to industrial high volume manufacturing applications. The perspective scope includes, but is not limited to the following areas: i. Optical Lithography ii. Extreme Ultraviolet (EUV) Lithography iii. Advanced Patterning Technologies iv. Metrology, Inspection and Testing v. Design and Technology Co-optimization and Design for Manufacturability vi. Materials vii. Process