Original papers are solicited presenting new developments in topics relevant to ICMTS, including but not limited to, test structures measurements and results, about: • R&D and manufacture of ICs, MEMS, sensors, actuators, photonics, bioelectronics, etc. • Material – Process – New Technology Characterizations • New devices – Memory Cells – Arrays • DC – Pulsed – RF: measurements techniques and applications • Design Methods – Verification – Metrology • Devices and Circuit Modeling – Parameter Extraction • Matching – Variability • Reliability – Wafer-level / thermal Product Failure Analysis and prediction • Yield Enhancement – Production Process Control • Measurements – Statistical Characterization – Probing – Throughput - Analysis – Strategies • NEW: Within-die circuits for process characterization / monitoring • NEW: Design enablement – Characterization and validation of digital and analog libraries