Experiencing twenty-seven years of strong commitment and immense growth, the IEEE MEMS conference series has evolved into a premier annual event in the MEMS area. The 29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2016) will report latest research results on every aspect of Microsystems technology, reflecting the continuing commitment and success of the international MEMS community. In recent years, the IEEE MEMS Conference has attracted more than 700 participants along with over 800 abstract submissions, and has created the forum to present over 200 selected top-quality papers in podium and poster/oral sessions. Its technical sessions provide ample opportunity for interaction between attendees, presenters and exhibitors.