The major areas of activity in the application of MEMS solicited and expected at this conference include but are not limited to:

• Mechanical, thermal, and magnetic sensors and actuators, and system

• Opto-mechanical microdevices and microsystems

• Fluidic microcomponents and microsystems

• Microdevices for data storage

• Microdevices for biomedical engineering

• Micro chemical analysis systems

• Microdevices and systems for wireless communication

• Microdevices for power supply and energy harvesting

• Nano-electro-mechanical devices and systems

• Scientific microinstruments