We are pleased to invite you to Kuala Terengganu, Malaysia for the 10th IEEE 2015 Regional Symposium on Micro and Nanoelectronics (RSM 2015). This bi-annual technical conference since 1997 aims at bringing together researchers from industry and academia to gather and explore various issues and trends in the field of semiconductor electronics. This is the 10th RSM organized by the Electron Devices Chapter of IEEE Malaysia Section and technically co-sponsored by the IEEE Electron Devices Society. Over the last eighteen years, RSM conference series has become the prominent international forum on semiconductor electronics embracing all aspects of the semiconductor technology from circuit device, modeling and simulation, photonics and sensor technology, MEMS technology, process and fabrication, packaging technology and manufacturing, failure analysis and reliability, material and devices and nanoelectronics.