We are pleased to invite you to Langkawi, Malaysia for the 9th IEEE Regional Symposium on Micro and Nanoelectronics (RSM2013) which will be held at the Holiday Villa Beach Resort & Spa Langkawi from 25th - 27th September, 2013. This bi-annual technical conference since 1997 aims at bringing together researchers from industry and academia to gather and explore various issues and trends in the field of micro and nano electronics. This is the 9th RSM organized by the Electron Devices Chapter of IEEE Malaysia Section and technically co-sponsored by the IEEE Electron Devices Society. Over the last eighteen years, RSM has become the preeminent regional and international forum on semiconductor electronics embracing all aspects of the semiconductor technology from circuit device, modeling and simulation, photonics and sensor technology, MEMS technology, process and fabrication, packaging technology and manufacturing, failure analysis and reliability, material and devices and nanoelectronics.