The 2014 Silicon Nanoelectronics Workshop is a satellite workshop of the 2014 VLSI Symposia sponsored by the IEEE Electron Device Society. It will be held on June 8-9, 2014 at the Hilton Hawaiian Village in Honolulu, Hawaii USA. This will be the nineteenth workshop in the annual series. Original papers on nanometer-scale devices and technologies which utilize silicon or which are based on silicon substrates are welcome.