The research of Cyber-Physical Systems (CPS) security addresses the security issues among close interactions and feedback loop between the embedded cyber components for computing and control and the dynamic physical components that involve mechanical components, human activities and surrounding environment. Example CPS systems include automotive and transportation systems, smart home, building and community, smart battery and energy systems, surveillance systems, cyber-physical biochip, and wearable devices. The recent advances of manufacturing technologies, system integrations and software platforms bring enormous challenges and opportunities for CPS design and implementation. However, the increasing complexity of networked computing systems makes modern network systems vulnerable to various attacks against their resources, infrastructure, and operability. The purpose of this workshop is to bring together researchers from a broad community, presenting state-of-the-art security solutions crossing software and hardware layers towards trustworthy CPS development and to motivate new research topics and directions in this interdisciplinary area.