1: Overviews of Nanopatterning Challenges

2: New Plasma Sources and New Etching Technologies

3: Nanopatterning for Advanced Logic and Memory Technology Nodes

4: Patterning Integration Schemes (multilayer, patterning, self-aligned patterning, etc.)

5: Patterning Materials and Etch: Joint Session with Conferences 9779 and 9782

6: Emerging Patterning Technologies (DSA, and other) Interactive Poster Session