Micro-nano is considered as an emerging high technology for the 21 century. It involves various high-tech fields including electronics, machinery, materials, manufacturing, testing, and disciplines of physical, chemical and biological. A lot of remarkacble achievements have been made in the past few years. Still it is expected that the emerging novel ideas will change people’s way of thinking. The aim of CSMNT is to bring together Chinese and International players in micro/nano science and technology under one roof. It is an opportunity to further explore both theoretical and practical issues in micro-nano science and technology and its applications. It also provides one platform for both researchers and practitioners to exchange ideas and establish collaboration. The 16th annual conference and the5thinternational conference of the Chinese society of micro-nano technology will be held in Chengdu, China. Chengdu, capital of Sichuan province in Southwest China, is one of the most modern and prosperous cities in china. The fertile Chengdu Plain, on which Chengdu is located, is also known as the “Country of heaven”. Being the birthplace of one of china’s 4 leading cuisines in china-Sichuan Cuisine, Chengdu is widely recognized as the “Land of Abundance and Capital of Great Food” and was crowned the UNESCO City of Gastronomy of the World in 2010, the first one in Asia.