AboutComponents, Circuits, Devices and Systems; Computing and Processing; Engineered Materials, Dielectrics and Plasmas; Engineering Profession; Photonics and Electrooptics Keywords:Lithography,EUV,Metrology,Inspection,Testing,Design for Manufacturability,Design and Technology Co-optimization,Materials,Device,Process Technologies, Scope:IWAPS is devoted to publishing research on the cutting-edge microelectronic manufacturing technology. The scope of the conference covers studies of advanced semiconductor manufacturing sciences and technologies from early stage theories and experiments to industrial high volume manufacturing applications. The perspective scope includes, but is not limited to the following areas: i. Optical Lithography ii. Extreme Ultraviolet (EUV) Lithography iii. Advanced Patterning Technologies iv. Metrology, Inspection and Testing v. Design and Technology Co-optimization and Design for Manufacturabilityvi. Materials vii. Device viii. Process Sponsor Type:3; 3; 9; 9; 9; 9; 9
Chengdu Section
China Integrated Circuit Innovation Alliance
Chinese Optical Society - COL
Guangzhou Section
Inst. of Microelectronics of the Chinese Academy of Sciences - IMECAS
Institute of Optics and Electronics, Chinese Academy of Sciences
Nanjing Chengxin Institute of IC Technology
留言