The 10th International Conference on Advanced Semiconductor Devices and Microsystems ASDAM 2014 will be devoted to the latest results of research and development in the field of new semiconductor devices and microsystems. Its goal is to bring together leading experts from institutes and universities as well as companies interested in the progress of high technology devices and microsystems. Materials and technologies - semiconductor and dielectric materials - high and low permittivity dielectrics - quantum heterostructures - MS, MSM and MIS structures - nanostructures and nanotubes, low-dimensional structures Structures and devices - physics of semiconductor devices - Si-based heterostructure devices - III-V and III-N heterostructure devices - quantum and resonance devices, microwave and mm-wave devices, nanodevices - lasers and photodetectors - particle detectors Modelling and characterization - 2-D and 3-D process, structure and device simulation - heterostructure device modelling - structural, optical and electrical characterization of materials, structures and devices - reliability evaluation and modelling Sensors and microsystems - advanced concepts in lithography, plasma etching and deposition techniques - surface and bulk micromachining - micro(nano)mechanical structures, micro(nano)electromechanical systems (MEMS, NEMS) design, fabrication and simulation