We welcome you to participate in the 20th Biennial IEEE UGIM (University Government Industry Micro/nano) Symposium. The goal of this symposium is to bring together leading educators and researchers from university, government, and industry around the world to discuss issues related to R&D cleanroom laboratories and trends therein. Representatives of university micro/nano fabrication facilities, ranging from new labs to nationally recognized facilities, have found this symposium an excellent forum for exchanging information and presenting new research and educational concepts. Agencies such as NSF, NIH, NIST, SEMATECH, SRC, DoD and ONR regularly participate. Industry interactions with universities, including technology transfer, collaborative research, and training efforts are frequently presented. The UGIM symposium will be held on the campus of Harvard University.