The IEEE-NEMS is a key conference series sponsored by the IEEE Nanotechnology Council focusing on advanced research areas related to MEMS, nanotechnology, and molecular technology. Prior conferences were held in Suzhou (China, 2013), Kyoto (Japan, 2012), Kaohsiung (Taiwan, 2011), Xiamen (China, 2010), Shenzhen (China, 2009), Hainan Island (China, 2008), Bangkok (Thailand, 2007), and Zhuhai (China, 2006). For the first time, the conference will be held outside Asia. The conference typically has ~350 attendees with participants from more than 20 countries and regions world-wide.