The World's Leading Symposium on Lithography and Nanofabrication EIPBN, the “3-Beams”, Conference, is the premier conference on the science and technology of nanopatterning. Traditionally focused on electron, ion, and photon beams, (the 3 beams), the technology of nanofabrication covered in this conference has grown to include nanoimprint and molecular self-assembly as well. This conference is the place to hear the newest techniques and the latest advances in patterning and device fabrication technology.