AboutBioengineering; Components, Circuits, Devices and Systems; Fields, Waves and Electromagnetics; Photonics and Electrooptics; Power, Energy and Industry Applications
Keywords:gyroscopes,micromechanical sensors,biomems,power mems,microfluidics,nanoelectromechanical systems (NEMS),actuators,optical mems,nanobiotechnology,inertial sensors,fluidic sensors,transducers,gas sensors,chemical sensors,physical sensors,lab-on-a-chip,MEMS packaging,MEMS materials,NEMS materials,NEMS packaging,medical MEMS,Nanofluidics,biochemical sensors,medical microsystems,RF MEMS,electromagnetic MEMS,nanoscale physical sensors,Ultrasonic MEMS transducers,force sensors,biofabrication,
Scope:The major areas of activity in the development of MEMS and NEMS solicited and expected at this conference include but are not limited to materials, design, simulation, fabrication, assembly, packaging, experimental verification and analysis of micro- and nanocomponents.
Sponsor Type:6