The impact of MEMS sensors is enormous in the industrial and consumer electronics domain. The growth rate of the sensor industry has a strong link to the growing MEMS-based sensor market. The area of MEMS sensors provides huge opportunities for the sensor industry, and it presents several challenging problems to the engineers, scientists and researchers for the continued growth through increased functionality, reliability, reduced power consumption, cost, etc. The aim of this special session is to provide aplatform for researchers and designers to share and show case their original works on the topic of MEMS sensor design and interfacing circuits.