In view of the characteristics of non-silicon flat micro parts in MEMS devices, such as small, light and thin, a vacuum adsorption microassembly system based on monocular micro-vision was established. Through the research on the key assembly technologies of the grasping methods, moving control and micro vision positioning, the general scheme of automatic assembly for flat micro parts is put forward, which is based on the combination of teaching playback and microscopic visual feedback. The overall control flow of the teaching playback, the visual recognition of the target parts and the adjustment of the position and attitude error compensation are discussed, and an automatic assembly program is developed by using VC++ platform. The experimental results show that the positioning, error compensation and posture adjustment of the micro parts has been implemented based on the microassembly platform. By the combinational control mode of visual servo and teaching playback, the automatic assembly of micro parts can be realized, and it has realistic significance to automatic assemble application.