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Effect of Substrate Pretreatment on the Microstructure and Properties of High-Entropy Nitride Coatings
编号：108 访问权限：仅限参会人 更新：2026-10-12 15:01:54 浏览：56次 口头报告

报告开始：2026年10月17日 18:05（Asia/Shanghai）

报告时间：15min

所在会场：[S2] Thin Film Coatings Research and Applications [S2A] Parallel Session

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摘要
This study primarily investigates the effects of different substrate pretreatment processes on the microstructure and properties of (AlSiVCrNb)N high-entropy nitride coatings. Using a vacuum ion plating machine, coating samples were designed and prepared under six different substrate pretreatment conditions: single SZF cleaning agent cleaning, single glow discharge cleaning, single ion source cleaning, and three combined cleaning processes (SZF + glow discharge + ion source cleaning, SZF cleaning agent + glow discharge cleaning, and SZF cleaning agent + ion source cleaning). Subsequently, the microstructure and morphology of the coatings were characterized using a white light interferometer, X-ray diffractometer, field emission scanning electron microscope, and atomic force microscope. The mechanical and tribological properties of the high-entropy nitride coatings were tested using a nanoindenter, friction and wear testing machine, and microscratch tester, aiming to explore the influence of different substrate pretreatment parameters on the microstructure and properties of the coatings.
 
关键词
High-Entropy Nitride Coatings,磁控溅射
报告人
Jialei Yuan
学生 xi'an technological university

稿件作者
Yuan jialei student
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重要日期

  • 会议日期

    10月16日

    2026

    至

    10月18日

    2026

  • 10月14日 2026

    初稿截稿日期

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中国机械工程学会
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扬州大学
中国矿业大学
中国机械工程学会表面工程分会
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