This study employs a Bdot probe array to measure magnetic fields during vacuum breakdown, aiming to identify breakdown pathways. A planar Bdot array was first tested under atmospheric conditions, with breakdown current path simulations conducted to analyze probe response and current distribution. Subsequently, the array layout was optimized for cylindrical miniature devices, enhancing magnetic field response accuracy and spatial resolution. Results indicate that the optimized array effectively captures breakdown magnetic field characteristics, providing a practical approach for investigating vacuum breakdown mechanisms and improving measurement techniques in pulsed power systems. This approach enables high spatial-resolution magnetic field measurements for cylindrical miniature devices for the first time, offering a new tool for precise breakdown path diagnostics and future pulsed power system optimization.
 

Magnetic Field Measurement,,Vacuum Breakdown,Bdot Probe