A Stator Design of Traveling-Wave Ultrasonic Micromotor
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摘要
With the development of Microelectromechanical systems technology, piezoelectric traveling-wave ultrasonic micromotor has been widely used in micro equipment due to excellent performance, such as high-density output, high torque at low speed. A stator structure of ultrasonic motor working under the B15 mode is analyzed and designed, which consists of a ring Si substrate of 3mm in radius, twenty Lead zirconate titanate (PZT) blocks and twenty supporting beams. The finite element simulation results show that the structure can generate two nearly symmetrical standing wave modes with a quarter wavelength difference in phase, and has a high quality factor (Q), so the micromotor can be driven by synthesizing high quality traveling-wave from the two standing waves, and can control the rotate speed through the drive voltage.
 
关键词
Traveling-wave ultrasonic micromotor; Annular stator; PZT; Standing-wave mode; Finite element simulation
报告人
JinxuanXie
School of Mechanical Engineering, Nanjing University of Science and Technology, Jiangsu Research Center for Intelligent Navigation and Control of Complex Motion

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重要日期
  • 会议日期

    05月27日

    2022

    05月29日

    2022

  • 02月28日 2022

    初稿截稿日期

  • 05月29日 2022

    注册截止日期

  • 06月22日 2022

    报告提交截止日期

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IEEE Beijing Section
China Electrotechnical Society
Southeast University
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IEEE Industry Applications Society
IEEE Nanjing Section
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