The direct-drive linear motion systems have been largely popularized to the industry applications, such as the precision machine tools and semiconductor equipment , due to its prominent superiority of high-velocity, high dynamic and high-precision. However, various disturbance/ uncertainty mainly caused by the endogenous parameter variation and exogenous perturbation impose large restrictions on the realization of these high-performance. Therefore, the disturbance/ uncertainty estimation and attenuation technique has aroused large interests in the industry. In order to reach the full potential of the PMLSM-driven motion system, this speech will talk about two basic drive and control technologies for high precision linear servo system: (1) high-bandwidth and strong robust current response method: the deadbeat predictive current control, (2) high-precision and high-dynamic position tracking control: sliding mode control and observer.

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