1 / 2020-07-22 18:28:16
Feasible Application of Polycrystalline Silicon Avalanche Mode LEDs to On-chip Optical Biosensing
Silicon LED,All-Silicon Integration,On-chip Biosensing
摘要待审
This silicon avalanche mode light emitting device(Si AM LED) was fabricated with N+PN+PN+ cascade structure by using polycrystalline silicon material. When the LED operates in an appropriate voltage, the visible light with wavelength ranging from about 400 nm to 900 nm can be observed at the reverse-biased junctions. Thanks to the cascade structure, the optical emission intensity can be enhanced through the minority carrier injection from the forward-biased junctions. Based on this Si AM LED, coupled with silicon nitride optical waveguides and silicon P-I-N detectors(for example), monolithic integration of all-silicon biosensing device could be realizable.
重要日期
  • 会议日期

    03月19日

    2021

    03月21日

    2021

  • 10月15日 2020

    初稿截稿日期

  • 12月05日 2020

    注册截止日期

主办单位
Chinese Society for Optical Engineering
协办单位
United Microelectronics Center
China Information Communication Technologies Group Co
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